| 基于SU-8负胶的微流体器件的制作及研究 |
| |
| 引用本文： | 王彬,陈翔,许宝建,金庆辉,赵建龙,徐元森.基于SU-8负胶的微流体器件的制作及研究[J].功能材料与器件学报,2006,12(3):215-219. |
| |
| 作者姓名： | 王彬 陈翔 许宝建 金庆辉 赵建龙 徐元森 |
| |
| 作者单位： | 中国科学院上海微系统与信息技术研究所,上海,200050 |
| |
| 基金项目： | 上海市AM基金
,
上海市纳米科技专项基金 |
| |
| 摘 要： | 采用SU-8结构释放并键合玻片制作了多层结构的微流体芯片,探讨了影响芯片气密性和沟道堵塞的因素,并通过荧光显示验证,提供了一种快速、低成本的塑性微流体器件制作方法.
|
| 关 键 词： | 微流体器件 结构释放 SU-8键合 塑性 |
| 文章编号： | 1007-4252（2006）03-0215-05 |
| 收稿时间： | 2005-07-01 |
| 修稿时间： | 2005-07-012005-09-28 |
Fabrication and study of microfluidic devices using SU- 8 |
| |
| WANG Bin,CHEN Xiang,XU Bao-jian,JIN Qing-hui,ZHAO Jian-long,XU Yuan-sen.Fabrication and study of microfluidic devices using SU- 8[J].Journal of Functional Materials and Devices,2006,12(3):215-219. |
| |
| Authors: | WANG Bin CHEN Xiang XU Bao-jian JIN Qing-hui ZHAO Jian-long XU Yuan-sen |
| |
| Affiliation: | Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China |
| |
| Abstract: | Based on SU -8 structural releasing and bonding with glass substrate, microfluidic chips with multilayered structure were fabricated. Various factors concerning the gas tightness and blocking of the channels were studied. Based on on - chip fluorescent illustration as on - line test, a rapid fabrication method of plastic microfluidic devices at low cost is presented. |
| |
| Keywords: | microfluidic device structural releasing SU - 8 bonding plastic |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
