轴跳动激光相干测量技术研究

转轴的圆跳动对机床的加工性能具有重要影 响。为了满足实时在线的高精度测量需求，提出了一种新颖高效 的轴跳动激光相干测量技术。该技术采用稳定可靠的基于塞曼效应的He-Ne激光器作为 光源，具有灵敏度高、输出信噪比高、精 度高、探测目标作用距离远等优点。另外，通过光纤传输，其测量 灵活性和抗干扰性得到了进一步提高，可以满足实时在线的远距离测量需求。实验 结果表明，该系统的测量不确定度小于0.1%。

Research on Laser Interference Measurement of Shaft Runout

Shaft runout has an important influence on the machining performance of machine tools. To meet the requirements of high precision, real-time and on-line shaft runout measurement, a novel efficient laser coherence technique for shaft runout measurement is proposed. Because of the use of a stable and reliable He-Ne laser based on Zeeman effect as the light source, the technique has the advantages of high sensitivity, high signal-to-noise ratio, high accuracy and long detection range. In addition, with the transmission by optical fiber, the flexibility and anti-interference of measurement are further improved. The demand of real-time and online long range measurement can be satisfied. The experimental result shows that the measurement uncertainty of this system is less than 0.1%.