TC4钛合金表面磁控溅射TiAlN涂层的组织与性能

采用TiAl合金靶材,在TC4钛合金基材表面以不同磁控溅射工艺沉积制备了TiAlN涂层。利用扫描电子显微镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)分别分析了不同工艺制备的TiAlN涂层的表面形貌、表面成分及相结构,并对TiAlN涂层的耐蚀性、耐磨性等进行了研究。结果表明,采用磁控溅射工艺可在TC4钛合金表面制备出表面相对平整且结构致密的TiAlN涂层;沉积了TiAlN涂层的TC4钛合金试样的表面性能得到了提高,其磨损失重量和TC4钛合金基材相比降低了80%,耐盐雾腐蚀性能达到了保护级9级。

Microstructure and Properties of TiAlN Coating Prepared by Magnetron Sputtering on Titanium Alloy

TiAlN coating was deposited on TC4 titanium alloy by magnetron sputtering technique, using TiAl alloy target. Scanning electron microscope （SEM） and energy dispersing spectrum （EDS） and X-ray diffraction （XRD） were employed to analyze the surface morphology, compositions and phase structure of TiAlN coating samples. Corrosion resisting property and wear-resisting property of TiAlN coating samples were analyzed, too. The results show that the TiAlN coating has smooth surface and compact structure. The corrosion resisting property and wear-resisting property of TC4 are considerably improved by TiAlN coating. The wear weightlessness was reduced by 80% , salt fog corrosion resistance levels to protection grade 9.