Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding |
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| Authors: | Xiaojun Li Xudi Wang Jian Jin Qisheng Tang Yangchao Tian Shaojun Fu Z Cui |
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| Affiliation: | 1. Institute of Micro/Nanotechnology, Old Dominion University, Norfolk, VA 23529, USA;2. Department of Chemical and Materials Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan;1. Department of Mechanical Engineering, University of Connecticut, Storrs, CT 06269-3139, USA;2. Thayer School of Engineering, Dartmouth College, Hanover, NH 03755, USA;3. Department of Electrical Engineering, University of Colorado Denver, Denver, CO, USA;1. Dept. of Electrical Engineering, Indian Institute of Technology Delhi, New-Delhi, India, 110016;1. Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtzplatz 1, Eggenstein-Leopoldshafen 76344, Germany;2. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics (CIOMP), Chinese Academy of Sciences, Changchun 130033, China;3. Changchun Institute of Optics, Fine Mechanics and Physics (CIOMP), Chinese Academy of Sciences, Changchun 130033, China;4. State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China |
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| Abstract: | Polymer-based micro/nano fluidic system is becoming indispensable for biological applications as well as physical chemistry research. In this article, we demonstrate a novel fabrication process for nano fluidic system based on hybrid mask-mould (HMM) lithography and thermal bonding using SU-8. With the HMM lithography, the protrusions of channels and reservoir patterns can be replicated in one step. Bonding process conditions are flexible and easily controllable with the use of PET substrate and the thin adhesive layer. Surface textures were found to be essential to the bonding strength and channel profile control. The fabricated fluidic system was characterized using spontaneous capillary filling with dyed water, demonstrating good quality of sealing. |
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