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Fabrication of novel double microlens using two step soft lithography
Authors:Han-Hyoung Kim  Beom-Hoan O  Seung-Gol Lee  Se-Geun Park
Affiliation:1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China;2. Key Laboratory of Photonics Technology for Information, Xi’an Jiaotong University, Xi’an 710049, China;3. Key Laboratory of Advanced Display and System Applications, Shanghai University, Ministry of Education, China;1. Nanomaterials Research Laboratory, Surface Engineering Division, CSIR – National Aerospace Laboratories, Bangalore 560017, India;2. Jawaharlal Nehru Centre for Advanced Scientific Research, Chemistry and Physics of Materials Unit, Jakkur, Bangalore 560064, India;1. Institute of Manufacturing Technology, Technische Universität Dresden, George-Bähr-Straße 3c, 01069 Dresden, Germany;2. Dresden Integrated Center for Applied Physics and Photonic Materials (IAPP) and Institute for Applied Physics, Technische Universität Dresden, Nöthnitzer Straße 61, 01187 Dresden, Germany;3. PROBIEN-CONICET, Dto. de Electrotecnia, Universidad Nacional del Comahue, Buenos Aires 1400, 8300 Neuquen, Argentina;4. Fraunhofer Institute for Material and Beam Technology IWS, Winterbergstraße 28, 01277 Dresden, Germany
Abstract:A novel method to fabricate double layer microlens array is proposed where the second smaller microlens are imprinted on the first larger microlens by using soft lithography twice. Key step to implement this method is to imprint micron-size structures on convex surface using nano-imprinting technology. It is required to prepare thin polydimethylsiloxane (PDMS) mold for the second soft lithography and thus different thickness of PDMS molds have been tested. It is found that 870 μm thick mold is good for fine duplication and durability. We have successfully fabricated the first microlens hemisphere of 51 μm diameter and the second microlens of 3 μm diameter on top of the first. The double microlens array shows more focused light spot when viewed through optical microscope.
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