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3D materials made of gold using Nanoimprint Lithography
Authors:Iris Bergmair  Michael Mühlberger  Kurt Hingerl  Ekaterina Pshenay-Severin  Thomas Pertsch  Ernst Bernhard Kley  Holger Schmidt  Rainer Schöftner
Affiliation:1. Functional Surfaces and Nanostructures, PROFACTOR GmbH, Steyr-Gleink 4407, Austria;2. Center of Surface- and Nanoanalytics, Johannes Kepler University, Linz 4040, Austria;3. Center for Innovation Competence »ultra optics«, Institute of Applied Physics, Friedrich-Schiller-University, Jena 07743, Germany;4. Microstructure Technology & Microoptics, Institute of Applied Physics, Friedrich-Schiller-University, Jena 07743, Germany;1. Northwestern University, Evanston, IL, United States;2. Department of Molecular Biophysics and Physiology, Rush University Medical Center, Chicago, IL, United States;1. Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899-8370, United States;2. Institute of Physical Chemistry, Polish Academy of Sciences, ul. Kasprzaka 44/52, 01-224 Warsaw, Poland;1. Sorbonne Universités, UMPC Univ Paris 06, CNRS, Institut Parisien de Chimie Moléculaire (IPCM), UMR 8232, 4 place Jussieu, F-75005 Paris, France;2. Indian Association for the Cultivation of Science, Department of Organic Chemistry, 700032 Kolkatta, India;3. J. Heyrovsky Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, Dolejskova 3, CZ-18223 Prague, Czech Republic;4. Sorbonne Universités, UMPC Univ Paris 06, CNRS, Laboratoire de Réactivité de Surface (LRS), UMR 7197, 4 place Jussieu, F-75005 Paris, France;5. Università degli Studi di Milano, Dipartimento di Chimica, via C. Golgi 19, I-20133 Milano, Italy;6. PSL Research University, Chimie ParisTech, CNRS, Institut de Recherche de Chimie Paris, F-75005 Paris, France
Abstract:In this work we show large area 3D stacking of gold structures like Split Ring Resonators (SRRs) and fishnet structures using Nanoimprint Lithography (NIL).Two main fabrication processes are used to stack multiple layers of such structures on top of each other: For the stacked fishnet structures a finished double-layer of gold structures is covered with a spacer layer which is planarized using chemical mechanical polishing so that a second layer can be processed on top. For the SRR structures a transfer printing process is used. Here the gold structures are transferred from one substrate onto another substrate. Especially this process is a new and unique possibility to stack gold patterns by transferring gold structures several time on the same substrate and therefore to build up 3D materials in a fast and cost efficient way.
Keywords:
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