Gold nanoparticles by soft UV nanoimprint lithography coupled to a lift-off process for plasmonic sensing of antibodies |
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| Authors: | G Barbillon F Hamouda S Held P Gogol B Bartenlian |
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| Affiliation: | 1. IOM-CNR, TASC Laboratory, Area Science Park – Basovizza, S.S 14 Km 163.5, I-34149 Trieste, Italy;2. Department of Molecular Sciences and Nanosystems, University Ca’ Foscari of Venice, Santa Marta 2137, 30123 Venice, Italy;1. Optical-Bio Microsystems Laboratory, Department of Mechanical Engineering, Concordia University, 1515 Saint Catherine Street West, EV13.235, Montreal, Quebec, Canada H3G 1M8;2. Electrocatalytic Green Engineering Group, Department of Mechanical Engineering, Concordia University 1515 Saint Catherine Street West, EV14.205, Montreal, Quebec, Canada H3G 1M8;1. Osaka Prefecture University, Graduate School of Engineering, Department of Physics and Electronics Engineering, Sakai 599-8531, Japan;2. Japan Science and Technology Agency, Core Research for Evolutionary Science and Technology, Kawaguchi 332-0012, Japan;3. Mechanical Design Co., Chohu 182-0024, Japan;4. Tokyo Institute of Technology, Graduate School of Information Science and Engineering, Department of Mechanical and Environmental Informatics, Tokyo 152-8550, Japan |
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| Abstract: | In this paper, we present the results of gold nanoparticles fabrication on large area by soft UV nanoimprint lithography (UV-NIL) and lift-off process for antibodies sensing. For this fabrication, the hard polydimethylsiloxane (H-PDMS) is used as flexible mold material. A simple AMONIL/PMMA bilayer is used to transfer patterns by etching the substrate with a suitable RIE process. The UV-NIL process has enabled to obtain gold nanoparticles with a diameter about 160 nm on a zone of 1 mm2. For bioplasmonic applications, the sensing of Anti-Biotin was studied. |
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