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Atomic layer deposition of ZnO on graphene for thin film transistor |
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| Affiliation: | 1. Department of Polymer Engineering and Color Technology, Amirkabir University of Technology, Tehran, Iran;2. Department of Chemistry, Institute for Advanced Studies in Basic Sciences (IASBS), Zanjan 45137-66731, Iran;1. College of Chemistry and Chemical Engineering, Hainan Normal University, Haikou 571158, PR China;2. College of Chemistry and Molecular Engineering, Qingdao University of Science and Technology, Qingdao 266042, PR China |
| Abstract: | A ZnO/graphene composite thin film was obtained by depositing ZnO on graphene through an Atomic Layer Deposition (ALD) process. The graphene layer was synthesized through a Chemical Vapor Deposition (CVD) process. The achievement of ZnO deposition on graphene was attributed to the Perylene Tetracarboxylic Acid (PTCA) treatment on graphene. Both ZnO Thin Film Transistor (TFT) and ZnO/graphene TFT were fabricated and tested. The results show that both of them displayed a high ON/OFF ratio, while ZnO/graphene TFT displayed an enhanced carrier mobility over ZnO TFT. |
| Keywords: | Composite materials Carbon materials Electrical properties Thin films Electronic materials |
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