薄膜涂层弹性模量的表征与评价研究

因薄膜有其极小的厚度和特殊的微结构等特征,它与相同成分的块体材料相比,二者的弹性模量在数值大小、测试设备、表征方法和技术上都有一定的差异。给出了超声波测速法、弯曲法、鼓膜法和纳米压入法等六种适合于表征薄膜弹性模量的方法,研究了它们的原理和理论模型,分析和讨论了它们的特点和适用性,解释了用不同表征方法得出的弹性模量在数值上存在差异的原因。在实际测量中,应结合各表征方法和薄膜自身的特点加以灵活选用。

Characterization and Evaluation of Elastic Modulus of Film Coatings

Since film has small thickness and peculiar microstructure, its numeric value, testing technology and characterization method in terms of elastic modulus differ to some degree from the bulk material of the same kind. This paper presented six methods for characterizing its elastic modulus and studied their principles and theoretical models, features and applications. Moreover it explained the reasons for differences in numeric values of elastic modulus characterized by different methods. The characterization methods should be applied according to features of the film.