Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications |
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Authors: | Aliza Aini Md Ralib Anis Nurashikin Nordin Raihan Othman Hanim Salleh |
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Affiliation: | (1) Department of Electrical and Computer Engineering, International Islamic University, Kuala Lumpur, Malaysia;(2) Department of Science in Engineering, International Islamic University, Kuala Lumpur, Malaysia;(3) Department of Mechanical Engineering, Universiti Tenaga Nasional, Kajang, Malaysia |
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Abstract: | Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant
miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature
energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts
are transformed into useful energy. Having self-powered, miniature acoustic sensors allows noise detection monitoring systems
to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate
with a top copper electrode. Design and finite element modelling of the design was conducted using Coventorware™. The AZO
piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction
(XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively.
Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration
frequencies of 30 kHz. This is in accordance with the Coventorware™ simulation results. This measured power level is sufficient
to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts. |
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