复杂非球面镜高效超精密车削加工法(英文)

本文中对复杂面形的非球面镜进行了分类,并从加工方法和加工路径优化设计等方面研究了复杂非球面镜的超精密车削方法.对回转对称的复杂非球面镜进行了加工实验,并借助超精密测量技术对各段曲面进行面形测量,依据测量结果实现面形补偿加工.最终粗糙度Ra达5.14 nm,形状精度P-V值达200 nm.采用提出的方法对非回转对称的非球面阵列进行加工路径设计,根据具体面形进行加工参数选择和实际加工,得到粗糙度Ra为7.81nm的表面.实验结果证明了提出的加工方法高效实用,可以满足大部分复杂非球面的应用需求.

High-Efficiency Ultra-Precision Turning for Complex Aspheric Mirrors

This paper introduced the categories of complex aspheric mirrors to study the fabrication of this complex surface using ultra-precision diamond turning.The machining method and cutting path optimal design were proposed in detail.In experiments,one rotationally symmetric complex aspheric mirror was machined.After cutting,each segment of aspheric was measured using the ultra-precision measuring method,with the results used to compensate the cutting to achieve the ultimate surface roughness Ra of5.14 nm and a form error P-V within 200 nm.Besides,another non-rotationally symmetric aspheric array was also machined experimentally with the cutting path designed by the proposed method.The cutting parameters were computed according to the surface form for machining and the finished surface roughness Ra achieved was 7.81 nm.The experimental results prove that the proposed high-efficiency machining method can meet most requirements of complex aspheric.