| 高精度电容式压力传感器测量方法 |
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| 引用本文： | 周华鹏,毛建国,顾筠,李芳培,柏方超,卢文玉. 高精度电容式压力传感器测量方法[J]. 传感器与微系统, 2010, 29(2) |
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| 作者姓名： | 周华鹏 毛建国 顾筠 李芳培 柏方超 卢文玉 |
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| 作者单位： | 1. 南京航空航天大学能源与动力学院,江苏,南京,210016
2. 江苏广播电视大学信息工程系,江苏,南京,210017 |
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| 基金项目： | 国家自然科学基金，江苏省普通高校研究生科研创新计划资助项目 |
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| 摘 要： | 提出了一种高精度、低成本的电容式压力传感器的测量方法。用RC振荡器将电容式传感元件的变化调制为时变频率信号,用SSP1492芯片测量该频率变化量,并送入C8051F021单片机,用高阶多项式完成频率变化到压力变化的解算,实现了高精度压力测量。实验结果显示:该方法用于电容式压力传感器的测量精度优于0.02%FS。
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| 关 键 词： | 压力传感器 信号调理 压力测量 单片机 |
Measurement method of high-precision capacitive pressure sensor |
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| ZHOU Hua-peng,MAO Jian-guo,GU Jun,LI Fang-pei,BO Fang-chao,LU Wen-yu. Measurement method of high-precision capacitive pressure sensor[J]. Transducer and Microsystem Technology, 2010, 29(2) |
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| Authors: | ZHOU Hua-peng MAO Jian-guo GU Jun LI Fang-pei BO Fang-chao LU Wen-yu |
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| Abstract: | A measurement approach for high-precision and low cost capacitive pressure sensor is presented.A RC oscillate circuit is used to modulate capacitive variance to frequency signal,which is measured by SSP1492.A C8051F021 MCU is employed to process the compute task from frequency variance to pressure variance by high-order polynomial so that high-precision pressure measurement is achieved.Experimental results show that the measurement precision by the proposed method can achieve 0.02 %FS. |
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| Keywords: | pressure sensor signal condition pressure measurement micro programmed control unit(MCU) |
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