Interference microscope-profilometer |
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| Authors: | E V Sysoev I A Vykhristyuk R V Kulikov A K Potashnikov V A Razum L M Stepnov |
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| Affiliation: | (1) Department of Biomedical Engineering and Physics, Academic Medical Center, University of Amsterdam, Amsterdam, The Netherlands |
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| Abstract: | The structure and functional capabilities of a digital optical microscope-profilometer capable of operating in two modes,
those of micro- and nanomeasurements, are presented. The instrument operation principle is based on measuring the phase function
of the wave front of light scattered by the measured surface. Software for the microscope-profilometer and its performance
characteristics are considered. |
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