| 基于快速成形的MEMS微制造技术 |
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| 引用本文： | 潘开林,陈子辰,付建中. 基于快速成形的MEMS微制造技术[J]. 中国机械工程, 2002, 13(20): 1721-1723 |
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| 作者姓名： | 潘开林 陈子辰 付建中 |
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| 作者单位： | 浙江大学,杭州市,310027 |
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| 摘 要： | 评述了当前主要的MEMS微制造技术方法及特点，综述了基于快速成形的MEMS微制造系统的基本原理和基本结构，目前所能达到的精度与应用典型实例，微型制造技术的优越性与局限性，对最新发展的每一层面一次曝光的高速快速成形MEMS微制造系统原理与研究示例进行了介绍。
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| 关 键 词： | 快速成形 微制造 微机电系统 微细立体光刻 |
| 文章编号： | 1004-132X(2002)20-1721-03 |
MEMS Microfabrication Technology Based on Rapid ProtoTyping |
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| PAN Kailin. MEMS Microfabrication Technology Based on Rapid ProtoTyping[J]. China Mechanical Engineering, 2002, 13(20): 1721-1723 |
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| Authors: | PAN Kailin |
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| Abstract: | Main microfabrication techniques for MicroElectroMechanical System (MEMS) are firstly commented on in this paper. The basic principle and framework of MEMS microfabrication system based on rapid prototyping are overviewed, and the microfabrication accuracy and examples are investigated. At last, a latest process called integral microstereolithography process in which a complete layer can be built using a single exposure is also reviewed with some examples. |
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| Keywords: | rapid prototyping microfabrication MEMS micro-stereolithgraphy |
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