Preparation and Physical Properties of Radiofrequency-Sputtered Amorphous Films in the System AlPO4–TiO2

Amorphous films in the system AlPO₄–TiO₂ were prepared by an rf-sputtering method, and their physical properties, such as density, refractive index, and thermal expansion coefficient, and the infrared absorption spectra were measured. The thermal expansion coefficient increased linearly with increasing TiO₂ content. The results of the molar refractivity and the infrared absorption spectra indicated that the coordination number of titanium ions in these films is higher than that in SiO₂–TiO₂ glasses with a negative thermal expansion, in which Ti⁴⁺ ions are tetrahedrally coordinated. In order to confirm the coordination state of the titanium ions in these amorphous films, titanium K -band emission spectra were obtained by X-ray emission spectroscopy, revealing sixfold coordination. The higher coordination state of Ti⁴⁺ was considered to account for these amorphous films not exhibiting negative thermal expansion, as in the SiO₂–TiO₂ system.