V-groove substrate fed logic |
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| Authors: | Ho Y.-L. Holmes F.E. Salama C.A.T. |
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| Affiliation: | University of Toronto, Department of Electrical Engineering, Toronto, Canada; |
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| Abstract: | A new substrate fed logic structure is presented which makes use of V-groove silicon etching. Experimental results are presented for the devices. A speed-power product below 1 pJ was obtained despite the large area of the test structures and the use of conventional bipolar processing. Further improvement in performance is expected by optimising the process parameters. |
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