基于MEMS技术硅微悬臂梁制作工艺研究

针对非制冷红外热成像中的双材料硅微悬臂梁阵列的结构要求，在MEMS常见加工工艺的基础上，提出了单个硅微悬臂梁的制作工艺路线。工艺中使用高浓度HF溶液释放牺牲层磷硅玻璃（PSG）。探讨了双层材料氮化硅和铝之间的断裂及氮化硅和硅基底之间的粘连问题，对工艺中影响成品率的关键因素残余应力进行了分析。

Research on Fabrication of Silicon Micro-cantilevers based on MEMS Technology

With the structural requirement of the non-refrigeration infrared thermal imagery in double material silicon micro cantilever beam array, from the basis of the MEMS common processing craft, the paper proposes manufacturing process route for the single silicon micro cantilever beam. The highly concentrated HF solution release to sacrifice level phosphorus silica glass （PSG） will be used. The break problem between the double-decked material silicon nitride and aluminum as well as the adhesion problem between silicon nitride and the silicon-based bottom are discussed. Residual stress is analyzed.