非球面部分补偿检测系统的误差分析与处理

为了实现非球面通用化、高精度检测,提出非球面部分补偿法,并进行误差分析与处理.在光学设计软件ZEMAX中对部分补偿检测系统进行系统建模并优化,分析器件姿态误差及装调精度对重构非球面面形的影响.通过对系统误差的分析,提出基于系统建模的光线追迹与误差存储相结合的系统误差处理方法,将系统误差归为由系统建模得到检测光路的误差和由误差存储得到不含检测光路的干涉仪系统的误差.通过计算机仿真及实验证明,部分补偿检测系统采用该误差处理方法去除系统误差后,可以由逆向迭代优化重构(ROR)技术重构出更精确的非球面面形.将该非球面面形与采用无像差点法得到的面形对比,结果较吻合,均方根(RMS)精度接近0.02λ(λ为波长).

Error analysis and processing of partial compensatory aspheric testing system

A partial compensatory aspheric testing system was proposed for general high-precision aspheric testing after extracting systematic error.System modeling was established with optimization,and the influence of surface figure and alignment precision on aspheric surface was analyzed in optical design software ZEMAX.By error analysis of aspheric testing system,the method of ray trace based on system modeling and error storage was employed to extract systematic error.Systematic error was categorized into two types,the error of testing path by ray trace in system modeling and the rest from the interferometer excluding testing path by the method of error storage.Computer simulation and experimental results show that aspheric surface is precisely reconstructed by revise iterative optimization reconstruction(ROR) after consideration of systematic error extracted by effective processing method.Comparison experiments showed that the reconstructed aspheric surface agreed well with the result of autocollimation method.The root mean square(RMS) value accuracy can reach 0.02λ(λ is wave).