| ZnS薄膜的溅射沉积及其XPS研究 |
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| 引用本文： | 周咏东,方家熊,李言谨,龚海梅,汤定元. ZnS薄膜的溅射沉积及其XPS研究[J]. 无机材料学报, 2000, 15(6): 1127-1130 |
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| 作者姓名： | 周咏东 方家熊 李言谨 龚海梅 汤定元 |
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| 作者单位： | 1. 苏州大学物理系, 苏州 215006; 2. 中国科学院上海技术物理研究所, 上海 200083 |
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| 基金项目： | 国家高技术航天领域青年基金资助!（863－2．00．4），江苏省教委自然科学基金资助!（98KJB430001） |
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| 摘 要： | 用Ａｒ＋束溅射沉积技术在ＨｇＣｄＴｅ表面实现了ＺｎＳ的低温沉积．用Ｘ射线光电子能借（ＸＰＳ）对上述ＺｎＳ薄膜以及热蒸发ＺｎＳ薄膜中的Ｚｎ、Ｓ元素的化学环境进行了对比实验研究．实验表明：离子束溅射沉积ＺｎＳ薄膜具有很好的组份均匀性，未探测到元素Ｚｎ、Ｓ的沉积．
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| 关 键 词： | ZnS 离子束溅射沉积 XPS HgCdTe 表面抗反射膜 |
| 文章编号： | 1000-324X(2000)06-1127-04 |
| 收稿时间： | 1999-12-16 |
| 修稿时间： | 1999-12-16 |
Sputtering Deposition and X-ray Photoelectron Spectroscopy Study for the ZnS Thin Film |
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| ZHOU Yong-dong,FANG Jia-xiong,LI Yan-Jin,GONG Hai-mei,TANG Ding-Yuan. Sputtering Deposition and X-ray Photoelectron Spectroscopy Study for the ZnS Thin Film[J]. Journal of Inorganic Materials, 2000, 15(6): 1127-1130 |
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| Authors: | ZHOU Yong-dong FANG Jia-xiong LI Yan-Jin GONG Hai-mei TANG Ding-Yuan |
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| Affiliation: | 1.Physics Department of Soochow University; Suzhou 215006; China; 2. Shanghai Institute of Technical Physics; Chinese Academy of Science; Shanghai 200083; China |
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| Abstract: | The ZnS film was grown on HgCdTe surface by using the low-temperature ion beam sputtering technique. Zn and S elements in the sputtering ZnS film sample were studied and compared with those in the evaporating ZnS film by using X-ray photoelectron spectroscopy (XPS) technique. It is proved that the constituent elements are homogeneous, and the deposition of element Zn, S cannot be detected in the sputtering ZnS film. |
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| Keywords: | ZnS ion beam sputtering deposition technique XPS HgCdTe surface anti-reflection coat |
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