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| 偏振激光干涉仪的纳米定位系统 | |
| 引用本文： | 许素安,Luc Chassagne,Suat Topcu,Yasser Alayli,李东升. 偏振激光干涉仪的纳米定位系统[J]. 中国计量学院学报, 2009, 20(2): 118-121 |
| 作者姓名： | 许素安 Luc Chassagne Suat Topcu Yasser Alayli 李东升 |
| 作者单位： | 1. 中国计量学院机,电工程学院,浙江,杭州,310018 2. 法国法尔赛大学,LISV实验室,法国,凡尔赛,78035 3. 中国计量学院,计量测试工程学院,浙江,杭州,310018 |
| 摘 要： | 详细阐述了用于纳米定位的偏振激光干涉仪的原理,并介绍了基于该偏振仪的纳米定位控制方法.该方法已由实验论证,实验位移系统的最小步长实测值为5 nm.并对系统的最小位移步长、重复性和分辨率做了详细的分析,在系统环境控制条件下适用于毫米行程位移,可应用于纳米计量和纳米加工. |
| 关 键 词： | 偏振干涉仪 锁相回路 纳米定位 |
Nanopositioning system based on polarimetric interferometer |
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| XU Su-an,Luc Chassagne,Suat Topcu,Yasser Alayli,LI Dong-sheng. Nanopositioning system based on polarimetric interferometer[J]. Journal of China Jiliang University, 2009, 20(2): 118-121 | |
| Authors: | XU Su-an Luc Chassagne Suat Topcu Yasser Alayli LI Dong-sheng |
| Affiliation: | 1. College of Electrical and Mechanical Engineering, China Jiliang University, Hangzhou 310018, China; 2. Universite de Versailles, LISV Laboratory, Versailles 78035, France; 3. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China) |
| Abstract: | The principle of polarimetric interferometer used for nanopositioning was presented; and the displacement control method based on this polarimetric inerferometer was introduced. The proposed principle was set up. The practical minimal displacement step of our established system was 5 nm. The experimental results of this system including minimal step, repeatability and resolution were presented. Such a system can be used over milimeter range displacements in a controlled surrounding environement leading to numerous applications in nanometroloy and nanoprocessing. |
| Keywords: | polarimetric interferometer phase locked loop nanopositioning |
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