Wavelength Tuning of Vertical-Cavity Surface-Emitting Lasers by an Internal Device Heater

We have fabricated thermal-induced wavelength- tunable vertical-cavity surface-emitting lasers with a 780-nm emission wavelength that is tunable by using an internal device heater. A 5.36-nm tuning range was achieved by means of a 70-mA tuning current and a 3.5-mA driving current while maintaining continuous single-mode operation and the optical power variation is less than 2.5 dB in the tuning range. In addition, a multimode tuning range of 9.1 nm was achieved with a 90-mA tuning current and a 7-mA driving current.