| 线性渐变滤光片镀制挡板设计 |
| |
| 引用本文： | 秦洁玉,罗崇泰,马勉军.线性渐变滤光片镀制挡板设计[J].真空与低温,2007,13(1):57-62. |
| |
| 作者姓名： | 秦洁玉 罗崇泰 马勉军 |
| |
| 作者单位： | 兰州物理研究所,表面工程技术国家级重点实验室,甘肃,兰州,730000 |
| |
| 摘 要： | 提出了一种膜厚修正挡板的设计方法,分析给出了使用挡板情况下基片膜厚和监控片膜厚的关系,对线性渐变滤光片镀制挡板进行了设计,给出了设计结果。用设计的挡板成功镀制了线性渐变滤光片,并给出了镀制结果。
|
| 关 键 词： | 薄膜厚度 修正挡板 设计 |
| 文章编号： | 1006-7086(2007)01-0057-06 |
| 修稿时间： | 2005年11月29 |
MASK DESIGN FOR LINEAR VARIABLE FILTERS |
| |
| QIN Jie-yu,LUO Chong-tai,MA Mian-jun.MASK DESIGN FOR LINEAR VARIABLE FILTERS[J].Vacuum and Cryogenics,2007,13(1):57-62. |
| |
| Authors: | QIN Jie-yu LUO Chong-tai MA Mian-jun |
| |
| Abstract: | A method of mask for adjusting the thin film thickness design was described.Relation between the film thickness on the substrates and that on the chips was analyzed when a mask is used.The mask for linear variable filters was designed.Some linear variable filters were successfully fabricated and the results were given. |
| |
| Keywords: | film thickness modifying mask design |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
