| 高冲击环境下MEMS大量程加速度传感器结构的失效分析 |
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| 引用本文： | 唐军,赵锐,石云波,刘俊.高冲击环境下MEMS大量程加速度传感器结构的失效分析[J].传感技术学报,2012,25(4):483-486. |
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| 作者姓名： | 唐军 赵锐 石云波 刘俊 |
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| 作者单位： | 中北大学仪器科学与动态测试教育部重点实验室,太原030051;中北大学电子测试技术国家重点实验室,太原030051 |
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| 基金项目： | 国家自然科学基金，山西省基础研究计划项目 |
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| 摘 要： | 对设计的大量程加速度传感器进行冲击测试,分析该种传感器结构在高冲击环境下的输出信号及可靠性。加速度传感器结构采用四端全固支结构,通过在梁的端部和根部设计倒角结构以分散应力。测试结果表明该传感器在232,119.4 gn下可以测试到有效输出信号。同时,对测试中失效传感器进行了分析,总结出大量程加速度传感器的在高冲击环境下的失效模式主要为键合引线的脱落、微梁的断裂和封装失效。
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| 关 键 词： | MEMS 大量程加速度传感器 冲击测试 高过载 失效 |
Failure Analysis of the MEMS Ultra High Measure Range Accelerometer Structure under High Impact Environment |
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| TANG Jun
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ZHAO Rui
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SHI Yunbo
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LIU Jun.Failure Analysis of the MEMS Ultra High Measure Range Accelerometer Structure under High Impact Environment[J].Journal of Transduction Technology,2012,25(4):483-486. |
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| Authors: | TANG Jun ZHAO Rui SHI Yunbo LIU Jun |
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| Affiliation: | 1,2(1.Key Laboratory of Instrumentation Science & Dynamic Measurement(North University of China),Ministry of Education, North University of China,Taiyuan 030051,China; 2.Science and Technology on Electronic Test & Measurement Laboratory,North University of China,Taiyuan 030051,China) |
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| Abstract: | The reliability and the failure of the ultra-high measure range accelerometer,which was under high impact environment,were discussed.Four-terminal fixed structure with chamfer at both the end of cantilever beam,which can disperse stress of beam structure were used.The test results showed that the sensor can work with the impact acceleration up to 232,119.4 gn.The analysis results show that the main failure modes of ultra high measure range accelerometers under high impact environment are shell fracture,cover dent,bonding failure and wire breaking off et al. |
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| Keywords: | MEMS ultra high-range accelerometer impact test high overload failure |
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