纳米压印复合软模具建模研究

基于复合软模具纳米压印是一种高效、低成本和批量化制造大面积微纳米结构的新方法，已经被看作是最具有工业化应用前景的微纳制造技术。大尺寸复合软模具的设计和制造是当前大面积纳米压印所面临的一项挑战性难题，也是影响和制约晶圆级微纳米压印广泛工业化应用的技术瓶颈。开展了大面积纳米压印复合软模具理论分析、数值模拟和试验验证的系统研究。基于薄板弯曲理论，建立复合软模具变形理论模型。利用ABAQUS模拟软件，揭示了模具几何特征、材料属性以及压印工艺要素对于复合软模具变形的影响及其规律。提出纳米压印复合软模具设计的基本准则。该研究为大面积纳米压印复合软模具设计、优化和制造奠定了重要理论基础，并为大面积纳米压印装备开发和工艺优化提供方向性指导。

Modeling of Flexible Composite Mold for Nanoimprint Lithography

Large-area nanoimprint lithography using flexible molds is an emerging nanopatterning approach for mass producing large-area micro/nano scale structures with low cost, high throughput and high resolution. Design and manufacturing of flexible composite molds have been considered as the most challenging issues for large-area NIL process, and a bottleneck hindering the industrialization of large-area NIL. The theoretical model, numerical simulation and experimental verification for flexible composite molds implementing large-area nanoimprinting are investigated. A theoretical model which can predict the deformation of flexible molds and determine suitable thickness of composite stamps is proposed. Furthermore, the effects of the thickness, the material properties, imprinting pressure for the flexible composite molds are revealed by numerical simulation using ABAQUS software. The mechanism and rule of the mold deformation are also discussed in detailed. Some fundamental design rules for flexible composite molds are put forwarded. These findings are valuable in providing a theoretical basis for designing and optimizing of flexible composite molds, and further enhancing the performance of large-area NIL process and tool.