A 6-degree-of-freedom measurement system for the accuracy of X-Y stages |
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| Authors: | Kuang-Chao Fan Mu-Jung Chen |
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| Affiliation: | a Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.;b Department of Mechanical Engineering, Lunghwa Institute of Technology, Taoyuan, Taiwan, R.O.C |
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| Abstract: | A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than ±0.1 μm to the range of 200 mm and the vertical straightness error is within ±1.5 μm for the measuring range of ±0.1 mm. The yaw and pitch errors are about ±1 arcsec, and the roll error is about ±3 arcsec within the range of ±50 arcsec. |
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| Keywords: | X-Y stage 6-degree-of-freedom Motion accuracy |
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