Al_2O_3陶瓷基片沉积钼膜的织构研究

采用蒸镀、离子束辅助沉积（IBAD）技术，在Al2O3（单晶、多晶）和玻璃基片上沉积钼膜，通过XRD，TEM等分析手段对于钼膜的织构及其产生机理进行了探讨。结果表明：在单晶和多晶A2O3以及非晶态玻璃基片上蒸镀的钼膜均存在强（110）织构。对于IBAD薄膜，随着氩离子轰击能量的增加，（110）织构向（200）织构转变。膜内应力计算及TEM观察结果证实，钼膜发生了塑性流变，而且塑性流变具有不均匀性。塑性流变的结果使得钼膜产生了（110）织构。

INVESTIGATION ON TEXTURE OF MOLYBDENUM FILMS DEPOSITED ON Al_2O_3 SUBSTRATES

Molybdenum films were deposited on polycrystalline Al2O3,single crystal Al2O3 (0001)and glass substrates by E-gun evaporation and ion-beam assisted deposition (IBAD). The texture of the films have been studied by XRD and TEM. The results show that a strong (110) texture in the films deposited by evaporation is changed to (200) texture by increasing the energy of Ar bombardment. Calculation of the stress in the film and the TEM observation indicate that there is a change of non-uniform plastic flow in the aolybdenum film which results in the (100) texture.