| 化学气相沉积光学级金刚石薄膜的研究进展 |
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| 引用本文： | 熊礼威,汪建华,满卫东,曹菊琴.化学气相沉积光学级金刚石薄膜的研究进展[J].激光与光电子学进展,2006,43(7):22-26. |
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| 作者姓名： | 熊礼威 汪建华 满卫东 曹菊琴 |
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| 作者单位： | 武汉工程大学湖北省等离子体化学与新材料重点实验室,武汉,430074;武汉工程大学湖北省等离子体化学与新材料重点实验室,武汉,430074;武汉工程大学湖北省等离子体化学与新材料重点实验室,武汉,430074;武汉工程大学湖北省等离子体化学与新材料重点实验室,武汉,430074 |
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| 摘 要： | 化学气相沉积（CVD））金刚石薄膜优异的光学性能在近几年得到了广泛的重视，关于它的研究也在近几年取得了较大的突破。综述了CVD金刚石薄膜的光学性能，着重从成核、生长和后期处理三个方面对光学级CVD金刚石薄膜的制备进行了讨论，并对今后的研究作了展望。
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| 关 键 词： | 金刚石薄膜 化学气相沉积 光学性能 成核 薄膜生长 |
| 收稿时间： | 2005-12-21 |
| 修稿时间： | 2005-12-212006-03-22 |
Advance of Optical Chemical Vapor Deposition Diamond Thin Films |
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| XIONG Liwei,WANG Jianhua,MAN Weidong,CAO Juqin.Advance of Optical Chemical Vapor Deposition Diamond Thin Films[J].Laser & Optoelectronics Progress,2006,43(7):22-26. |
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| Authors: | XIONG Liwei WANG Jianhua MAN Weidong CAO Juqin |
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| Affiliation: | Key Laboratory of Plasma Chemistry and Advanced Materials of Hubei Province, Wuhan Institute of Technology, Wuhan 430074 |
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| Abstract: | During these years, the excellent properties of chemical vapor deposition(CVD) diamond film have gained widespread research interest, and the studies on their optical applications have made great progress. The optical properties of CVD diamond film are summarized; the three facets of the preparation of optical CVD diamond film, such as nucleation, growth and processing, are discussed; and finally, the foreground of the study on optical diamond film is expected. |
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| Keywords: | diamond thin film chemical vapor deposition optical property nucleation film growth |
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