朗缪尔探针在射频离子源中的扰动仿真研究

准确的等离子体参数信息对射频离子源的研制十分重要,为获得这些关键参数,需要借助朗缪尔探针作为研究手段.研究利用COMSOL软件作为研究平台,建立射频离子源的几何模型,并加入探针作为变量,通过仿真模拟得到不同功率下的电子密度、电子温度分布,通过对比有、无探针加入的情况下所得参数的变化趋势,来分析朗缪尔探针对射频离子源的扰...

Research on disturbance of Langmuir probe in radio frequency ion source

Accurate plasma parameter information is very important to the development of radio frequency ion sources.To obtain these parameters,the Langmuir probe is selected as the research method.The research uses COMSOL software as the research platform to establish the geometric model of the radio frequency ion source,and adds the probe as a variable.Through simulation,the electron density and electron temperature distribution under different powers are obtained,and these parameters are compared with and without probes.So the disturbance of the Langmuir probe to the radio frequency ion source could be analyzed.The research results show that the simulation model is more reasonable through experiments;and after the probe is put into the plasma,the plasma will be disturbed,and the plasma discharge center shifts more than 1 cm to the right.Therefore,the research results provide a reference for the design of radio frequency ion source.