An experimental analysis of electrostatically vibrated array of polysilicon cantilevers

Micromechanical cantilevers are one of the most fundamental and widely studied structures in micro-electromechanical systems. Dynamic response of such cantilevers has long been an interesting subject to researchers and different analytical and experimental approaches have been reported to determine it. Theoretical estimation of different damping mechanisms have been reported over years which are relevant particularly in studying the dynamics of the micro-mechanical structures. Most properties and functionalities of the MEMS devices are invariably dependant on the dynamic response of the devices, which in turn depends on the quality factor of the devices or in other words the overall damping present in the system. This paper presents a thorough experimental analysis of vibration characteristics of micro-mechanical cantilevers of different dimensions. Arrays of polysilicon micro-cantilevers of different dimensions have been designed and fabricated using surface micromachining process. The beams are resonated by electrostatic actuation and their vibration characteristics have been observed using Laser Doppler Vibrometer. Also a thorough analysis of modal behaviour of the beams is presented using analytical approach and finite element method based simulation. Different damping mechanisms have been critically reviewed and a semi-analytical estimation of the overall damping is presented. The results are compared with experimental values.