金属涂敷硅锥阴极的工艺研究

本文比较了金属和硅两种场发射阴极的优缺点，研究了将两者优点结合在一起的金属涂敷硅阴极的制造工艺，比较了电镀法和溅射法制备的金属涂层对硅的附着力；采用先溅射后电镀的两步工艺制作出了较为理想的包全硅尖阵列。

Study of the Metal Coating Technique of Making Silicon Cathodes

In this paper,we compared metal cathodes and cathodes and researdhed the metal coating technique which feafured the combination of the advantages of these two kinds of cathodes ,Aiso ,we compared the metal-silicon cohesive force of the silicon cathod fabricated byelectroplating and sputtering methods.In addition,we got sosmewhat ideal metal coating cathods by employing the sputering-electroplating two steptechnique.