| 连续金属薄膜的电阻率研究 |
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| 引用本文： | 范平,伍瑞锋,赖国燕. 连续金属薄膜的电阻率研究[J]. 真空科学与技术学报, 1999, 19(6) |
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| 作者姓名： | 范平 伍瑞锋 赖国燕 |
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| 作者单位： | 深圳大学理学院!深圳518060(范平，伍瑞锋)，深圳丰华电脑有限公司!深圳518048(赖国燕) |
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| 摘 要： | 运用玻耳兹曼方程研究金属薄膜中的电子输运 ,考虑了来自表面和晶粒间界的散射 ,计算连续金属薄膜的平行电阻率。得到的电阻率理论曲线与实验曲线符合得很好。弥补了F S理论在较薄厚度时电阻率理论结果与实验结果不相符的缺陷。
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| 关 键 词： | 金属薄膜 玻耳兹曼方程 F-S理论 电阻率 |
Calculation of Metallic Films Resistivities |
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| Fan Ping,Wu Ruifeng. Calculation of Metallic Films Resistivities[J]. JOurnal of Vacuum Science and Technology, 1999, 19(6) |
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| Authors: | Fan Ping Wu Ruifeng |
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| Abstract: | Electron transport in metallic films were studied by means of Boltzmann equation to evaluate its in plane resistivities.In our calculation,electron scattering due to either film surfaces and grain boundaries was considered.Our calculation agrees well with experimental results;whereas Fuchs Sondheimer theory fails to provide any result close to experimental studies for thin films. |
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| Keywords: | Metallic film Bolatzmann equation Fuchs Sondheimer theory Resistivity |
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