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纳米ZrO2 基烧结型双敏元件的研究??
引用本文:陈伟,黄世震,林伟,黄兆新,李成泉,孙吉.纳米ZrO2 基烧结型双敏元件的研究??[J].传感技术学报,2004,17(3):472-475,496.
作者姓名:陈伟  黄世震  林伟  黄兆新  李成泉  孙吉
作者单位:福州大学气敏传感器研究所,福州,350002
摘    要:纳米ZrO2作为一种新型的陶瓷材料已被应用于许多领域.本文主要介绍了低温强碱法制备纳米ZrO2材料,利用纳米ZrO2进行掺杂制作的元件有较好的气、湿敏特性.元件具有响应恢复快、结构简单等特点.作为湿敏元件时元件电容随湿度变化大,温度影响较小.作为电阻型气敏元件时,元件对NH3的选择性高.

关 键 词:湿敏传感器  电容式  NH3传感器
文章编号:1004-1699(2004)03-0472-04

Study on the Humidity and Gas Sensor Based on Nanosized Zircon Powder
CHEN Wei,HUANG Shi??zheng,LIN Wei,HUANG Zhao??xin,LI Cheng??quan,SUN Ji.Study on the Humidity and Gas Sensor Based on Nanosized Zircon Powder[J].Journal of Transduction Technology,2004,17(3):472-475,496.
Authors:CHEN Wei  HUANG Shi??zheng  LIN Wei  HUANG Zhao??xin  LI Cheng??quan  SUN Ji
Affiliation:Gases Sensors I nstitute of Fuz hou University , Fuzhou, 350002, China
Abstract:Nanosized powder zircon as a new ceramic material are used in many fields. This paper introduced how to prepare the nanosize zircon in a low-temperature super alkaline condition, and to fabricate the sensors by using this material with different doping. The sensor is sensitive to humidity and NH 3, with characters of fast response and recovery in good time. The structure of the sensor is simple, and the sensor is easier to be made than other sensors. The capacity of the sensor obviously changes with the humidity, but less responses to temperature variation. As a conductance type gas sensor, the component is well selective to NH 3.
Keywords:ZrO2
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