| 高精度长光栅动态光刻机定位误差校正 |
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| 引用本文： | 杨世雄,顾庆祥,陈骥.高精度长光栅动态光刻机定位误差校正[J].传感技术学报,1988,1(1). |
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| 作者姓名： | 杨世雄 顾庆祥 陈骥 |
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| 作者单位： | 重庆大学
(杨世雄，顾庆祥)，重庆大学(陈骥) |
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| 摘 要： | 本文介绍了一种采用微机对高精度长光栅动态光刻机定位误差进行实时校正的方法,提出了空间域脉冲增减法误差校正原理,设计了误差校正电路和校正软件。该方法可从空间域同时校正定位信号误差和温度误差,校正精度较高。实验结果表明该方法是可行的,该方法的提出为研制高精度长光栅提供了一条新的途径。
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| 关 键 词： | 光栅 定位 误差 校正 微型计算机 |
The Positioning Error Correction of Dynamic Photoengraving Instrument of High Precision Linear Grating |
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| Yang Shixiong Gu Qingxiang Chen Ji.The Positioning Error Correction of Dynamic Photoengraving Instrument of High Precision Linear Grating[J].Journal of Transduction Technology,1988,1(1). |
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| Authors: | Yang Shixiong Gu Qingxiang Chen Ji |
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| Affiliation: | Chongqing University |
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| Abstract: | A method of correcting the positioning error of dynamic photoengraving instrument of high precision linear grating by use of microcomputer is described in this paper. The error correction principle of spatial domain pulse plus-and-minus method is put foward. The error correction circuit is devised and computer software developed. By using this principle, we can correct the positioning signal error and the temperature error simultaneously arc! gain higher correction accuracy. The experiments proved the turing, which offers us a new way of designing and manufacturing high precision linear grating. |
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| Keywords: | grating positioning error correction microcomputer |
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