Surface-passivated high-resistivity silicon substrates for RFICs |
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Authors: | Rong B Burghartz JN Nanver LK Rejaei B van der Zwan M |
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Affiliation: | Delft Univ. of Technol., Netherlands; |
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Abstract: | Surface passivation of high-resistivity silicon (HRS) by amorphous silicon thin-film deposition is demonstrated as a novel technique for establishing HRS as a microwave substrate. Metal-oxide-silicon (MOS) capacitor measurements are used to characterize the silicon surface properties. An increase of the quality factor (Q) of a 10-nH spiral inductor by 40% to Q=15 and a 6.5-dB lower attenuation of a coplanar waveguide (CPW) at 17 GHz indicate the beneficial effect of the surface passivation for radio frequency (RF) and microwave applications. Regarding CPW attenuation, a nonpassivated 3000-/spl Omega//spl middot/cm substrate is equivalent to a 70-/spl Omega//spl middot/cm passivated substrate. Surface-passivated HRS, having minimum losses, a high permittivity, and a high thermal conductivity, qualifies as a close-to-ideal radio frequency and microwave substrate. |
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