| 变栅距衍射光栅刻划机的控制系统设计 |
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| 引用本文： | 时轮. 变栅距衍射光栅刻划机的控制系统设计[J]. 微细加工技术, 2002, 0(4): 32-35 |
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| 作者姓名： | 时轮 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,长春,130022 |
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| 摘 要： | 提出了采用相位扫描方法加工变栅距（VLS）光栅的基本原理，给出了VLS光栅刻划机的控制系统，并通过刻划实验对这一新方法进行了验证。
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| 关 键 词： | 变栅距 光栅 刻划机 控制系统 干涉仪 工作原理 微电子 |
| 文章编号： | 1003-8213(2002)04-0032-04 |
| 修稿时间： | 2002-07-23 |
Control System Design of Ruling Engine for Varied-line Space (VLS) Diffraction Gratings |
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| SHI Lun. Control System Design of Ruling Engine for Varied-line Space (VLS) Diffraction Gratings[J]. Microfabrication Technology, 2002, 0(4): 32-35 |
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| Authors: | SHI Lun |
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| Abstract: | The phase-scanning method for manufacturing the varied-line space (VLS) gratings is suggested first time. The control system of the VLS gratings ruling engine is given also and a ruling experiment of the VLS gratings is made to examine the novel method. |
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| Keywords: | varied-line space ( VLS ) gratings ruling engine control system |
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