Sol-gel制备PLCT薄膜的结晶特性与电畴结构研究

运用sol-gel技术制备了(Pb,La,Ca)TiO3(简写为PLCT)铁电薄膜;利用XRD、SEM、AFM和EDAX分析了PLCT薄膜的结构、表面形貌和组分。XRD衍射结果表明,PLCT薄膜呈钙钛矿结构。随着退火时间的增加,PLCT薄膜的XRD衍射峰的强度也随之增加。SEM、AFM分析表明,PLCT铁电薄膜表面平整、致密、无裂缝。EDAX分析表明,PLCT薄膜的实际组分十分接近设计组分。利用PFM分析了PLCT薄膜的电畴结构,发现随着退火时间的增加,PLCT薄膜的电畴由细小圆点状逐渐增大并形成片状电畴。

The crystalline property and domain structures of PLCT films prepared by sol-gel process

Textured Ca modified(Pb,La)TiO_3(PLCT) films were deposited on Pt/Ti/SiO/Si substrates using a sol-gel process.The microstructure of the PLCT thin film was investigated by X-ray diffraction(XRD),scanning electron microscopy(SEM),and atomic force microscopy(AFM).The composition of the film was investigated by EDAX.The XRD pattern of the film shows a pure perovskite structure.SEM and AFM images show that the surface of the film was smooth,compact and crackless.EDAX analysis shows that the actual composition of the films was consistent with the stoichiometric one.The domain structure of PLCT ferroelectric film was analyzed by PFM,it was found that the domain grows up from small dot to big dot and joins together with increase of annealed time.