| Monte Carlo方法计算定量俄歇电子能谱分析中的背散射因子 |
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| 引用本文： | 谈文舒,丁泽军,张增明.Monte Carlo方法计算定量俄歇电子能谱分析中的背散射因子[J].电子显微学报,2005,24(6):541-546. |
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| 作者姓名： | 谈文舒 丁泽军 张增明 |
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| 作者单位： | 合肥微尺度物质科学国家实验室,中国科学技术大学物理系,安徽,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学物理系,安徽,合肥,230026;合肥微尺度物质科学国家实验室,中国科学技术大学物理系,安徽,合肥,230026 |
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| 基金项目： | National Natural Science Foundation of China（ No. 10025420, No.90206009） |
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| 摘 要： | 本文通过Monte Carlo方法模拟计算了定量俄歇电子能谱分析（如对Ni的LVV俄歇电子和Pt的M5N67N67俄歇电子）中的背散射因子。由于计算中结合了相关领域的各种最新进展．因此该新计算可以为定量俄歇电子能谱分析提供更为准确的参数。
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| 关 键 词： | 背散射因子 俄歇电子能谱(AES) 蒙特卡洛(Monte Carlo) |
| 文章编号： | 1000-6281（2005）06-0541-06 |
| 收稿时间： | 2005-06-15 |
| 修稿时间： | 2005-06-15 |
Monte Carlo calculation of backscattering factor for quantitative AES analysis |
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| TAN Wen-shu,DING Ze-jun,ZHANG Zeng-ming.Monte Carlo calculation of backscattering factor for quantitative AES analysis[J].Journal of Chinese Electron Microscopy Society,2005,24(6):541-546. |
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| Authors: | TAN Wen-shu DING Ze-jun ZHANG Zeng-ming |
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| Affiliation: | Hefei National Laboratory for Physical Sciences Microscale and Department of Physics, University of Science and Technology of China, Hefei Anhui 230026, China |
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| Abstract: | Using a Monte Carlo simulation method a novel calculation on the backscattering factor in quantitative Auger electron spectroscopy(AES) analysis has been performed,for Ni L_3VV and Pt M_5N_(67)N_(67) Auger excitation as examples.Up-to-date advances in the related fields have been considered in the calculation,leading to more accurate results for quantitative AES analysis. |
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| Keywords: | backscattering factor AES Monte Carlo |
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