滑流边界条件下MEMS微圆盘的气体压膜阻尼分析

在考虑滑流边界条件的基础上，分析了微缝隙间气体流动的特性，提出了一种粘度修正的分析方法。基于微缝隙气流的粘度修正模型，分析了气体对微圆盘的压膜阻尼效应，得到微圆盘表面的压强分布、压膜阻尼力和压膜阻尼系数的解析解。通过与有限元数值解进行对比，两者结果吻合非常好，误差小于0．0468%，证实了解析解的正确。指出MEMS微圆盘的气体压膜阻尼不但与结构尺寸有关，而且与固体壁面的材质、粗糙度和光洁度等有关。

Analysis on Squeezed Gas Film Damping of MEMS Micro Plates With Slip Flow Boundary Condition

The characteristic of gas flow in micro-gaps is analyzed with slip-flow boundary condition and an analysis method for viscous amendment is presented. Based on a viscosity amendment model of gas flow in micro-gap, squeezs gas film damping effect on micro plates is investigated. An analytical solution of pressure distribution, the squeezed film damping force and damping coefficient on the surface of the micro plates are obtained. Compared with the numerical solution of FEM method, the analytical solutions accord well with them, with errors less than 0. 0468%,which proves that the analytical solution is correct. Finally, it is pointed out that the squeeze gas film damping force on micro plates is related not only to structure dimensions, but also to the factors, such as solid wall material, surface roughness, smooth finish and so on.