| 一种新型微机械硅弹簧的设计与制作 |
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| 引用本文： | 李文军,赵小林,蔡炳初,周光亚. 一种新型微机械硅弹簧的设计与制作[J]. 微细加工技术, 2001, 0(4): 70-73,69 |
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| 作者姓名： | 李文军 赵小林 蔡炳初 周光亚 |
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| 作者单位： | 上海交通大学微纳米科学技术研究院, |
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| 摘 要： | 介绍了一种新型的微机械硅弹簧的设计和制作，运用能量方法推导出了弹性常数的计算公式，并用有限元模拟分析方法求出了其固有频率。有限元模拟工具ANSYS模拟的结果验证了弹性常数的计算公式，理论分析和实际加工表明设计方案是可行的。
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| 关 键 词： | 微机电系统 硅弹簧 弹性常数 有限元 微细加工 |
| 文章编号： | 1003-8213(2001)04-0070-04 |
Design and Fabrication of a Novel MEMS Silicon Spring |
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| LI Wen jun,ZHAO Xiao lin,CAI Bing chu,ZHOU Guang ya. Design and Fabrication of a Novel MEMS Silicon Spring[J]. Microfabrication Technology, 2001, 0(4): 70-73,69 |
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| Authors: | LI Wen jun ZHAO Xiao lin CAI Bing chu ZHOU Guang ya |
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| Abstract: | A novel MEMS silicon spring has been successfully designed and fabricated.The formula used to calculate the spring constant were derived by energy method.The natural frequency of the spring was analyzed by simulation analysis using Finite Element Method.The computation formula of the spring constant was verified with ANSYS Finite Element Method.Theoretical analysis and fabrication process indicated that the design was feasible. |
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| Keywords: | micro electro mechanical system(MEMS) silicon spring spring constant natural frequency Finite Element Method |
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