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Localized Laser‐Based Photohydrothermal Synthesis of Functionalized Metal‐Oxides
Authors:Kyungmook Kwon  Jaeho Shim  Jeong Oen Lee  Kyunghan Choi  Kyoungsik Yu
Affiliation:1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Korea;2. Department of Electrical Engineering, California Institute of Technology, Pasadena, CA, USA
Abstract:We discuss the rapid in situ hydrothermal synthesis of metal oxide materials based on the photothermal superheating of light‐absorbing metal layers for simple and facile on‐demand placement of semiconductor materials with micrometer‐scale lateral resolution. Localized heating from pulsed and focused laser illumination enables ultrafast growth of metal oxide materials with high spatiotemporal precision in aqueous precursor solution. Among many possible electronic and optoelectronic applications, the proposed method can be used for laser‐based in situ real‐time soldering of separated metal structures and electrodes with functionalized semiconductor materials. Resistive electrical interconnections of metal strip lines as well as sensitive UV detection using photohydrothermally grown metal oxide bumps are experimentally demonstrated.
Keywords:hydrothermal synthesis  laser‐based fabrication  metal oxides  photothermal process
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