| 电容式硅微机械陀螺仪结构设计及仿真 |
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| 引用本文： | 赵幸娟,王瑞荣,石云波,刘俊,唐军.电容式硅微机械陀螺仪结构设计及仿真[J].功能材料与器件学报,2011,17(3):333-337. |
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| 作者姓名： | 赵幸娟 王瑞荣 石云波 刘俊 唐军 |
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| 作者单位： | 中北大学电子测试国家重点实验室;中北大学仪器科学与动态测试教育部重点实验室; |
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| 基金项目： | 高灵敏度多层纳米膜隧穿微陀螺仪研究(50675212); 重点实验室基金(NO.9140C1204021008) |
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| 摘 要： | 通过对微机械陀螺的调研分析,提出了一种新型微机械陀螺仪,并对陀螺进行了结构设计.该结构采用静电梳齿驱动、栅结构电容检测,使陀螺具有较高灵敏度.驱动模态和检测模态均为滑膜阻尼,能够实现较高的Q值,且具有一定的解耦特性.文中通过仿真分析得到了结构的各阶频率,使陀螺驱动模态和检测模态固有频率匹配,验证了结构的合理性.结合现有...
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| 关 键 词： | 硅微机械陀螺 电容检测 结构设计 |
The Structure Design and Simulation of Capacitive Silicon Micromechanical Gyroscope |
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| ZHAO Xing-juan,WANG Rui-rong,SHI Yun-bo,LIU Jun,TANG Jun.The Structure Design and Simulation of Capacitive Silicon Micromechanical Gyroscope[J].Journal of Functional Materials and Devices,2011,17(3):333-337. |
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| Authors: | ZHAO Xing-juan WANG Rui-rong SHI Yun-bo LIU Jun TANG Jun |
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| Affiliation: | ZHAO Xing-juan1,WANG Rui-rong2,SHI Yun-bo3,LIU Jun4,TANG Jun5(1.2.3.4.5.Science and Technology on Electronic Test & Measurement Laboratory,North University of China,taiyuan,030051,China,3.4.5,Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education,China) |
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| Abstract: | By researching and analyzing the micromechanical gyroscopes,a novel micromechanical gyroscope is proposed and the structure is designed.The method of electrostatic comber drive,capacitive detection of bar structure is used for the structure,and it makes the gyroscope high sensitivity.Slide-film damping is the main air damping of the drive mode and detect mode.It is possible to achieve high Q-values at atmospheric pressure.The gyroscope has the decoupled characteristic.By large number of simulation analysis,... |
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| Keywords: | Silicon micromechanical gyroscope capacitive detection structure design |
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