| 振弦式硅微机械陀螺 |
| |
| 引用本文： | 陈志龙,白书华.振弦式硅微机械陀螺[J].功能材料与器件学报,2011,17(2):233-236. |
| |
| 作者姓名： | 陈志龙 白书华 |
| |
| 作者单位： | 南昌理工学院; |
| |
| 摘 要： | 提出了一种新的振弦式硅微机械陀螺的设计方案,这一陀螺的制作采用硅微机械工艺.一方面,陀螺驱动模块采用电磁力驱动,这样能极大地提高驱动幅度;另一方面,陀螺检测模块采用差分的双振弦方式,从而提高了检测精度.通过陀螺检测模块的振弦将角速度的变化直接转换成输出信号的频率变化,这样能够极大地提高信号的抗干扰能力.理论分析表明,这...
|
| 关 键 词： | 微机械 振弦 陀螺 |
Vibrating Strings Silicon Micro-machined Gyro |
| |
| CHEN Zhi-long,BAI Shu-hua.Vibrating Strings Silicon Micro-machined Gyro[J].Journal of Functional Materials and Devices,2011,17(2):233-236. |
| |
| Authors: | CHEN Zhi-long BAI Shu-hua |
| |
| Affiliation: | CHEN Zhi-long,BAI Shu-hua(Nanchang Institute of Technology,Nanchang 330044,China) |
| |
| Abstract: | The author puts forward a design of new gyro. The gyro can be fabricated by bulk micro-machined processwith SOI silicon. On one hand, the gyro adopts electromagnetic force driving, so the driving amplitude can be verylarge and it can improve the gyro's sensitivity. On the other hand, the gyro adopts two vibrating strings to detect thesignal. The vibrating strings transfer the Coriolis force directly to the frequency changes of the signal. So theanti-interference capacity of the signal can be improved highly... |
| |
| Keywords: | Micro-machined Vibrating string Rate gyro |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
