| 碳纳米管压力传感器研究进展 |
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| 引用本文： | 张锦文,李伟.碳纳米管压力传感器研究进展[J].功能材料与器件学报,2011,17(3):253-257. |
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| 作者姓名： | 张锦文 李伟 |
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| 作者单位： | 北京大学微电子学研究院微米/纳米加工技术国家级重点实验室;北京大学深圳研究生院; |
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| 摘 要： | 碳纳米管因其独特而优异的电学、力学、热学、化学及电子特性等在很多领域上展现应用的潜力,而近年来碳纳米管在压力传感器方面的应用成为研究热点之一.本文综述了碳纳米管压力传感器的基本原理以及研究进展,并对不同类型的碳纳米管压力传感器进行了比较.
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| 关 键 词： | 碳纳米管 压力传感器 压阻特性 场发射特性 温敏特性 |
Progress of Carbon Nanotube-based Pressure Sensors |
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| ZHANG Jin-wen,LI Wei.Progress of Carbon Nanotube-based Pressure Sensors[J].Journal of Functional Materials and Devices,2011,17(3):253-257. |
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| Authors: | ZHANG Jin-wen LI Wei |
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| Affiliation: | ZHANG Jin-wen1,LI Wei 1,2(1.Institute of Microelectronics,The National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Peking University,Beijing 100871,China2.Shenzhen Graduate School of Peking University,Shenzhen 518005,China) |
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| Abstract: | Carbon nanotube will have many potential applications in the future due to its unique electrical,mechanical,thermal,chemical and electronic properties.Carbon nanotube-based pressure sensors have been explored and studied by many researchers in recent years.Their working principles and progress are reviewed in this paper.In the meantime,three different types of carbon nanotube-based pressure sensors are compared. |
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| Keywords: | carbon nanotube pressure sensors piezoresistance effect field emission resistance temperature dependence |
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