Diffusion of copper in thin TiN films |
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Authors: | MB Chamberlain |
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Affiliation: | Sandia National Laboratories, Albuquerque, NM 87185, U.S.A. |
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Abstract: | The diffusivity of copper in thin TiN layers was determined in specimens prepared by r.f. sputtering a copper (80 nm) layer onto a TiN (200 nm) layer on sapphire and silicon substrates. Specimens were isothermally heat treated at 608, 635 and 700 °C at pressures lower than 2 × 10?6 Pa; they were compositionally analyzed by Rutherford backscattering spectroscopy and Auger sputter profiling; and they were microstructurally characterized by transmission electron microscopy and electron diffraction. The diffusivity D = 9 × 107cm2s?1exp(?427 kJmol?1/RT) from 608 to 700 °C. The mechanisms of copper diffusion were not bulk processes, but they were probably processes involving primarily grain boundaries in the TiN. This very low diffusivity at these temperatures makes TiN/Cu an excellent candidate for a high temperature metallization for silicon solar concentrator cells. |
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