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Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings |
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| Authors: | K. V. Gogolinskii K. L. Gubskii A. P. Kuznetsov V. N. Reshetov I. I. Maslenikov S. S. Golubev V. G. Lysenko S. I. Rumyantsev |
| Affiliation: | 1. Technological Institute of Superhard and New Carbon Materials, Troitsk, Russia 2. National Nuclear Research University ?C Moscow Engineering-Physics Institute (NIYaU MIFI), Moscow, Russia 3. Moscow Institute of Physics and Technology (MFTI), Dolgoprudnyi, Russia 4. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia |
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