| 静电执行的MEMS多层膜材料参数在线提取方法 |
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| 引用本文： | 聂萌,黄庆安,王建华,戎华,李伟华. 静电执行的MEMS多层膜材料参数在线提取方法[J]. 半导体学报, 2004, 25(11): 1537-1543 |
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| 作者姓名： | 聂萌 黄庆安 王建华 戎华 李伟华 |
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| 作者单位： | 东南大学MEMS教育部重点实验室，东南大学MEMS教育部重点实验室，合肥工业大学理学院，东南大学MEMS教育部重点实验室，东南大学MEMS教育部重点实验室 南京210096，合肥工业大学理学院，合肥230009，南京210096，合肥230009，南京210096，南京210096 |
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| 摘 要： | 基于静电执行结构,结合能量法,推导出不等宽多层两端固支梁在静电作用下发生吸合(pull-in)现象时吸合电压的解析表达式,并用数值方法进行了拟合修正,用Coventorware软件进行的模拟表明所得拟合表达式具有较高的精度.由于吸合电压与梁的材料参数和几何尺寸有关,通过改变梁的几何尺寸可以得到不同的吸合电压值,从而得到梁各层材料的参数,即多层膜各层的材料参数
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| 关 键 词： | 两端固支梁 吸合 材料参数提取 模拟 |
| 文章编号： | 0253-4177(2004)11-1537-07 |
| 修稿时间： | 2003-10-20 |
An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film |
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| Nie Meng ,,Huang Qing'an ,Wang Jianhua ,Rong Hua and Li Weihua. An Electrostatic Actuated Microelectromechanical In-Situ Extracting Method for Material Property of Multi-Layer Film[J]. Chinese Journal of Semiconductors, 2004, 25(11): 1537-1543 |
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| Authors: | Nie Meng Huang Qing'an Wang Jianhua Rong Hua Li Weihua |
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| Affiliation: | Nie Meng 1,2,Huang Qing'an 1,Wang Jianhua 2,Rong Hua 1 and Li Weihua 1 |
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| Abstract: | The analytical expression of pull-in voltage of multi-width doubly-clamped multi-layer beam under an electrostatic load is obtained by using energy method,and is fitted by numerical analysis.The result is verified through the CoSolveEM module in Coventorware,showing high accuracy.Since the pull-in voltage is related to material properties and geometry of the beam,material property extraction can be implemented by making a set of beams with different geometry.Compared with simulating results it shows that they agree with each other great well. |
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| Keywords: | doubly-clamped beam pull-in material properties extraction simulation |
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