| 用于压力传感器的石英谐振膜片 |
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| 引用本文： | 张祖荫 梁显鉴. 用于压力传感器的石英谐振膜片[J]. 仪表技术与传感器, 1996, 0(1): 35-36 |
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| 作者姓名： | 张祖荫 梁显鉴 |
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| 作者单位： | 华南师范大学实验中心，华南师范大学实验中心 广州市 510631，广州市 510631 |
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| 摘 要： | 叙述了用于压力传感器的石英谐振膜片的原理。介绍了石英谐振膜片的设计和工艺。对这种新型压力敏感元件的性能及有关问题作了讨论。
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| 关 键 词： | 石英 压力 传感器 谐振膜片 |
Resonance Quartz Diaphragms as Pressure Sensing Elements |
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| Zhang Zuyin and Liang XiangjianSouth China Normal University,Guangzhou .. Resonance Quartz Diaphragms as Pressure Sensing Elements[J]. Instrument Technique and Sensor, 1996, 0(1): 35-36 |
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| Authors: | Zhang Zuyin Liang XiangjianSouth China Normal University Guangzhou . |
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| Affiliation: | Zhang Zuyin and Liang XiangjianSouth China Normal University,Guangzhou 510631. |
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| Abstract: | The principle, design, and process of resonance quartz diaphragms as pressure sensing elements are presented in this paper. The behaviour of the pressure sensing elements and related issues are also discussed. |
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| Keywords: | Quartz Pressure Sensor Resonance Diaphragm. |
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