| InSb薄膜制备工艺技术研究 |
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| 引用本文： | 刘佩瑶,于成民.InSb薄膜制备工艺技术研究[J].仪表技术与传感器,1996(2):18-21. |
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| 作者姓名： | 刘佩瑶 于成民 |
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| 作者单位： | 沈阳仪器仪表工艺研究所!沈阳市110043 |
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| 摘 要： | 本文介绍了InSb薄膜制备工艺技术的研究成果,系统地阐述了InSb薄膜的工艺机理与制备技术,指出了制备InSb薄膜过程中所需解决的技术关键,并总结了制备InSb薄膜的工艺条件和实验结果.
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| 关 键 词： | InSb 薄膜 工艺 磁敏元件InSb ThinFilm Process Magnetic Element |
A Study of Process Techniques for InSb Thin Film Fabrication |
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| Liu Peiyao,Yu Chengmin and Wang XiaowenShenyang Institute of Instrumentation Technology,Shenyang.A Study of Process Techniques for InSb Thin Film Fabrication[J].Instrument Technique and Sensor,1996(2):18-21. |
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| Authors: | Liu Peiyao Yu Chengmin and Wang XiaowenShenyang Institute of Instrumentation Technology Shenyang |
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| Affiliation: | Liu Peiyao,Yu Chengmin and Wang XiaowenShenyang Institute of Instrumentation Technology,Shenyang 110043 |
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| Abstract: | This paper introduces the research results of InSb thin film fab-rication processes, systematically elaborates the key techniques and mechanism of InSb thin film fabrication, and presents the process conditions and experiment results. |
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| Keywords: | InSb Thin Film Process Magnetie Element |
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