一种宽动态范围的在线式微波功率检测系统

设计了一种具有宽动态范围的在线式MEMS微波功率检测系统，建立了MEMS悬臂梁的等效模型，对MEMS悬臂梁结构进行了过载功率的理论研究，得到过载功率与梁尺寸的关系。并基于此关系设计了不同尺寸的MEMS梁，以提高系统的功率检测上限，从而提高在线式微波功率检测系统的动态范围。根据系统的结构参数，得到系统理论动态范围为0～8.41 W。建立了微波功率检测系统的仿真模型，s参数仿真结果表明，在8～12 GHz下，系统的回波损耗为-37.61 dB至-46.15 dB,插入损耗为-0.28 dB至-0.16 dB。系统在具有较宽动态范围的同时兼具良好的微波特性。该研究对基于MEMS梁的微波功率检测系统设计具有一定的参考价值。

An On-Line Microwave Power Detection System with WideDynamic Range

An on-line MEMS microwave power detection system with wide dynamic range was designed. The equivalent model of MEMS cantilever beam was established. The overload power of MEMS cantilever structure was studied theoretically, and the relationship between overload power and beam size was obtained. Based on this relationship, MEMS beams of different sizes were designed to improve the upper limit of system power detection, so as to improve the dynamic range of on-line microwave power detection system. According to the structural parameters of the system, the dynamic range of the system was 0~8.41 W. The simulation model of microwave power detection system was established. The S-parameter simulation results show that the return loss of the system is from -37.61 dB to -46.15 dB and the insertion loss is from -0.28 dB to -0.16 dB at 8~12 GHz. It has a wide dynamic range and good microwave performance. This work has a certain reference value for the research of microwave power detection system based on MEMS beams.