磁性薄膜高频磁导率测量方法及其研究进展

磁性薄膜广泛应用于信息存储、电磁兼容、磁传感器和微波通讯设备等众多领域,其高频复磁导率谱的准确测量是磁性薄膜研究中的一个重要课题。目前薄膜材料复磁导率的常用测量方法包括微波谐振腔法、检测线圈法和传输/反射法等。首先简要介绍了谐振腔法和检测线圈法,然后重点介绍了微波频率(GHz)下磁性薄膜传输/反射法磁导率测量近年来最新研究进展。

Development of Measurement for High Frequency Permeability of Magnetic Thin Films

Magnetic thin films are widely used in various fields,such as information storage,electromagnetic compatibility,magnetic field sensors and microwave communication devices.The measurement of complex permeability of thin films at microwave frequency is an important problem in the research of magnetic thin films.At present,the usual methods used for measuring the magnetic permeability of thin films includes microwave resonant cavity method,pick-up coil method and transmission/reflection method,and so on.The cavity method and pick-up coil method were briefly presented in this paper firstly,and then the recent research progress of the measurement based on transmission/reflection method at GHz frequency was focused on.